JPH01110266U - - Google Patents
Info
- Publication number
- JPH01110266U JPH01110266U JP318088U JP318088U JPH01110266U JP H01110266 U JPH01110266 U JP H01110266U JP 318088 U JP318088 U JP 318088U JP 318088 U JP318088 U JP 318088U JP H01110266 U JPH01110266 U JP H01110266U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- liquid phase
- epitaxial growth
- phase epitaxial
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP318088U JPH0623577Y2 (ja) | 1988-01-14 | 1988-01-14 | 液相エピタキシャル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP318088U JPH0623577Y2 (ja) | 1988-01-14 | 1988-01-14 | 液相エピタキシャル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110266U true JPH01110266U (en]) | 1989-07-25 |
| JPH0623577Y2 JPH0623577Y2 (ja) | 1994-06-22 |
Family
ID=31204584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP318088U Expired - Lifetime JPH0623577Y2 (ja) | 1988-01-14 | 1988-01-14 | 液相エピタキシャル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623577Y2 (en]) |
-
1988
- 1988-01-14 JP JP318088U patent/JPH0623577Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623577Y2 (ja) | 1994-06-22 |